Capillary effect-based selective sealing strategy for increasing piezoelectric MEMS speaker performance

Nature·Aug 7

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Figure of merit for piezoelectric MEMS speakers

Nature·Jul 11

2

Cantilever beam-based piezoelectric micromachined ultrasonic transducer with post processing soft interconnecting strategy for in-air rangefinding

Nature·May 19

3

Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping

Nature·Sep 29

4

A polymer-based MEMS loudspeaker featuring a partially stiffened membrane actuated by a PZT thin film

Nature·May 29

5

Flexible multifunctional platform based on piezoelectric acoustics for human–machine interaction and environmental perception

Nature·Sep 14

6

Acoustic stimulation of the human round window by laser-induced nonlinear optoacoustics

Nature·Apr 8

7

Stimulation efficiency of an actuator driven piston at the biological interface to the inner ear | Scientific Reports

Nature·Dec 9