Three-phase ScAlN-based PMUT-driven acoustic streaming micropump
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Researchers have developed a micropump driven by piezoelectric micromachined ultrasonic transducers, specifically using a ScAlN-based design. The technology has potential applications in wearable ultrasound imaging and in flowmeters for small-diameter uses. The development involves miniaturized and high-uniformity transducer arrays with broadband and high-sensitivity capabilities.